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VLSI Technology, by Simon Sze
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This is a superb state-of-the-art collection of contributed readings by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
- Sales Rank: #568637 in Books
- Published on: 1988-02-01
- Original language: English
- Number of items: 1
- Dimensions: 10.50" h x 1.75" w x 8.50" l,
- Binding: Hardcover
- 676 pages
Most helpful customer reviews
16 of 16 people found the following review helpful.
Not a book but a collection of review articles
By A Customer
The problem with the book is that it is not a book at all: it is a collection of 12 articles which vary enormously in their style and level. Some are excellent, like Richard Fair's RTP chapter, but many are run-of-the-mill reviews. A welcomed addition is that wafer cleaning and clean room technology have chapters of their own, usually they tend to be regarded as side issues. Editors have not syncronized the chapters: planarization is discussed twice: in both CVD and process integration chapters and silicides three times: in RTP, metallization and process integration.
The book is not specifically about ULSI: it is a general overview of silicon (mostly MOS) process technologies, or at least I do not consider molecular beam epitaxy, contact lithography or bias sputtered quartz as ULSI technologies. Maybe this is for textbook completeness, but then why is oxidation absent ?
The intended audience of this book remains a mystery to me: in the preface it is described as a textbook (for senior undergraduates or first year graduate students) but the structure of the book does not support a fabrication course because many essential items have been left out: e.g. oxidation and ion implantation.
Most chapters contain 50-100 references to literature, but to old literature: process integration chapter ("totally revised and updated") average date of references is 1987, with only a handful of 1990's articles.
4 of 5 people found the following review helpful.
Sze did not write this!!!!!!!!!!!!!!!!!!!!!!
By A Customer
This book is merely a collection of articles written by various authorities in the field. Sze probably put the end of chapter problems in it (most of which are challenging) which do not closely reflect the chapter's theme. In that sense, this is a BAD book - the correlation is awful. As far as just reading the chapters, some of the chapters are well written and this book merits 3 stars. I think it is safe to say there are better books (real textbooks by one or two authors) out there pertaining to the field of VLSI Fabrication.
0 of 3 people found the following review helpful.
Excellent condition
By Saeed Gharagozlian
i think i bought it because it was written NEW but i reckon it has been used! but still in amazingly good condition!
anyway that was a good buy
thanks
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